Defect-induced bandgap narrowing in low-k dielectrics

نویسندگان

  • X. Guo
  • H. Zheng
  • S. W. King
  • V. V. Afanas'ev
  • M. R. Baklanov
  • J. L. Shohet
  • V. V. Afanas’ev
  • J.-F. de Marneffe
  • Y. Nishi
چکیده

Articles you may be interested in Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics Appl. Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation Appl. Influence of electron-beam and ultraviolet treatments on low-k porous dielectrics

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تاریخ انتشار 2015